In-situ photoemission spectroscopy for chemical reaction dynamics study of Si(001) oxidation by using high-energy-resolution synchrotron radiation

Teraoka, Yuden; Yoshigoe, Akitaka

Oyo Butsuri, 71(2), p.1523 - 1527, 2002/12

http://joi.jlc.jst.go.jp/JST.Journalarchive/oubutsu1932/71.1523

The translational kinetic energy of incident molecules is an important parameter for the study of surface chemical reaction mechanisms. New adsorption reactions, induced by the O translational kinetic energy of several eV, have been found in the O/Si(001) system by applying the surface photoemission spectroscopy with supersonic molecular beam techniques and the high-energy-resolution synchrotron radiation. The termination of dangling bonds affected dominantly the oxidation of dimer backbonds. By controlling the translational kinetic energy of incident O molecules, the formation of oxide-layers with a sub-nanometer scale is possible at room temperature.